P

Inventor

LAFONTAINE MARVIN R

US8 patents
⚠️ This page may combine multiple inventors who share the name “LAFONTAINE MARVIN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

3 patents
US7952851B2May 31, 2011

Wafer grounding method for electrostatic clamps

AXCELIS TECH INC10 citations82
US7828504B2Nov 9, 2010

Combination load lock for handling workpieces

AXCELIS TECH INC4 citations58
US8023247B2Sep 20, 2011

Electrostatic chuck with compliant coat

AXCELIS TECH INC0 citations50

LEE WILLIAM D

3 patents
US8270142B2Sep 18, 2012

De-clamping wafers from an electrostatic chuck

LEE WILLIAM D6 citations70
US9558980B2Jan 31, 2017

Vapor compression refrigeration chuck for ion implanters

LEE WILLIAM D0 citations39
US8241425B2Aug 14, 2012

Non-condensing thermos chuck

LEE WILLIAM D0 citations39

TAO TENG CHAO D

1 patent
US8422193B2Apr 16, 2013

Annulus clamping and backside gas cooled electrostatic chuck

TAO TENG CHAO D58 citations91

SMITH DAVID B

1 patent
US8902560B2Dec 2, 2014

Electrostatic chuck ground punch

SMITH DAVID B0 citations40