Inventor
NAKANO AKINORI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO AKINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
6 patentsUS9478414B2Oct 25, 2016
Method for hydrophobization of surface of silicon-containing film by ALD
ASM IP HOLDING BV465 citations99
US9190263B2Nov 17, 2015
Method for forming SiOCH film using organoaminosilane annealing
ASM IP HOLDING BV518 citations98
US9117657B2Aug 25, 2015
Method for filling recesses using pre-treatment with hydrocarbon-containing gas
ASM IP HOLDING BV518 citations98
US9029272B1May 12, 2015
Method for treating SiOCH film with hydrogen plasma
ASM IP HOLDING BV526 citations98
US9899291B2Feb 20, 2018
Method for protecting layer by forming hydrocarbon-based extremely thin film
ASM IP HOLDING BV463 citations95
US11482418B2Oct 25, 2022
Substrate processing method and apparatus
ASM IP HOLDING BV4 citations73