Inventor
FUKUSHIMA HIDEKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “FUKUSHIMA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS9329137B2May 3, 2016
Defect inspection method and device using same
HITACHI HIGH TECH CORP4 citations73
US7719671B2May 18, 2010
Foreign matter inspection method and foreign matter inspection apparatus
HITACHI HIGH TECH CORP3 citations62
US10955361B2Mar 23, 2021
Defect inspection apparatus and pattern chip
HITACHI HIGH TECH CORP0 citations52
US10948424B2Mar 16, 2021
Defect inspection device, pattern chip, and defect inspection method
HITACHI HIGH TECH CORP0 citations52
US9606071B2Mar 28, 2017
Defect inspection method and device using same
HITACHI HIGH TECH CORP1 citations52
US7986405B2Jul 26, 2011
Foreign matter inspection method and foreign matter inspection apparatus
HITACHI HIGH TECH CORP0 citations51