Inventor
TIMANS PAUL J
US16 patents
⚠️ This page may combine multiple inventors who share the name “TIMANS PAUL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
11 patentsUS7642205B2Jan 5, 2010
Rapid thermal processing using energy transfer layers
MATTSON TECH INC57 citations97
US6951996B2Oct 4, 2005
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC84 citations97
US6849831B2Feb 1, 2005
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC135 citations97
US7317870B2Jan 8, 2008
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC46 citations95
US8000587B2Aug 16, 2011
Pulsed processing semiconductor heating methods and associated system using combinations of heating sources
MATTSON TECH INC17 citations91
US7115837B2Oct 3, 2006
Selective reflectivity process chamber with customized wavelength response and method
MATTSON TECH INC38 citations91
US7045746B2May 16, 2006
Shadow-free shutter arrangement and method
MATTSON TECH INC21 citations88
US7737385B2Jun 15, 2010
Selective reflectivity process chamber with customized wavelength response and method
MATTSON TECH INC13 citations82
US7977258B2Jul 12, 2011
Method and system for thermally processing a plurality of wafer-shaped objects
MATTSON TECH INC11 citations80
US11195732B2Dec 7, 2021
Low thermal budget annealing
MATTSON TECH INC0 citations62
US12399064B2Aug 26, 2025
Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures
MATTSON TECH INC0 citations51
TIMANS PAUL J
4 patentsUS8138105B2Mar 20, 2012
Rapid thermal processing using energy transfer layers
TIMANS PAUL J17 citations91
US8557721B2Oct 15, 2013
Rapid thermal processing using energy transfer layers
TIMANS PAUL J9 citations83
US8837923B2Sep 16, 2014
Pulsed processing semiconductor heating methods using combinations of heating sources
TIMANS PAUL J4 citations82
US9633876B2Apr 25, 2017
Selective reflectivity process chamber with customized wavelength response and method
TIMANS PAUL J5 citations81