Inventor
HUMMEL MICHAEL
DE27 patents
⚠️ This page may combine multiple inventors who share the name “HUMMEL MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS11430643B2Aug 30, 2022
Quantification of processing chamber species by electron energy sweep
TOKYO ELECTRON LTD7 citations83
US11600474B2Mar 7, 2023
RF voltage and current (V-I) sensors and measurement methods
TOKYO ELECTRON LTD6 citations74
US12394600B2Aug 19, 2025
Balanced RF resonant antenna system
TOKYO ELECTRON LTD2 citations73
US11251021B2Feb 15, 2022
Mode-switching plasma systems and methods of operating thereof
TOKYO ELECTRON LTD2 citations73
US11817296B2Nov 14, 2023
RF voltage and current (V-I) sensors and measurement methods
TOKYO ELECTRON LTD2 citations72
US12580153B2Mar 17, 2026
Balanced resonator source for plasma processing
TOKYO ELECTRON LTD0 citations62
US12176183B2Dec 24, 2024
RF voltage and current (V-I) sensors and measurement methods
TOKYO ELECTRON LTD0 citations62
US11545302B2Jan 3, 2023
Mold for forming a radio frequency (RF) coil for a plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US10910196B1Feb 2, 2021
Mode-switching plasma systems and methods of operating thereof
TOKYO ELECTRON LTD0 citations62
AALTO UNIV FOUNDATION SR
5 patentsUS11168196B2Nov 9, 2021
Separation and upcycling of cellulose-containing blended waste
AALTO UNIV FOUNDATION SR6 citations68
US11486094B2Nov 1, 2022
Method to convert mechanical pulp derived waste material into value added cellulose products
AALTO UNIV FOUNDATION SR2 citations66
US12577706B2Mar 17, 2026
Lyocell fibers and methods of producing the same
AALTO UNIV FOUNDATION SR0 citations55
US11549200B2Jan 10, 2023
Process for making cellulose fibre or film
AALTO UNIV FOUNDATION SR0 citations53
US12509801B2Dec 30, 2025
Recycling of acid-superbase conjugate ionic liquids by water removal in the lyocell spinning process
AALTO UNIV FOUNDATION SR0 citations51
POLY CLIP SYSTEM GMBH & CO KG
4 patentsUS7654889B2Feb 2, 2010
Clip machine
POLY CLIP SYSTEM GMBH & CO KG10 citations83
US8579682B2Nov 12, 2013
Displacer FCA Y
POLY CLIP SYSTEM GMBH & CO KG6 citations72
US7926689B2Apr 19, 2011
Adjustable clip advance
POLY CLIP SYSTEM GMBH & CO KG2 citations62
US9259010B2Feb 16, 2016
Automatic displacer clearance adjustment
POLY CLIP SYSTEM GMBH & CO KG0 citations51