Inventor

RUBEL PAUL J

US25 patents

⚠️ This page may combine multiple inventors who share the name “RUBEL PAUL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUBEL PAUL J

INNOVATIVE MICRO TECHNOLOGY

Method and apparatus for sorting particles with a MEMS device

Hysteretic MEMS thermal device and method of manufacture

MEMS actuator and method of manufacture for MEMS particle sorting device

MEMS teeter-totter apparatus with curved beam and method of manufacture

Method and apparatus for assembling an array of micro-devices

Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture

Interconnect structure using through wafer vias and method of fabrication

System and method for forming moveable features on a composite substrate

Method and apparatus for assembling an array of micro-devices

Method and apparatus for assembling an array of micro-devices

Hysteretic MEMS thermal device and method of manufacture

Singly attached MEMS thermal device and method of manufacture

Multiple switch MEMS structure and method of manufacture

MEMS thermal actuator and method of manufacture

Hysteretic MEMS two-dimensional thermal device and method of manufacture

MEMS thermal actuator and method of manufacture

OPTICAL COATING LABORATORY INC

Optical cross-connect with magnetic micro-electro-mechanical actuator cells

Optical switch with low-inertia micromirror

RUBEL PAUL J

Microfabicated electromagnetic actuator with push-pull motion

Method of manufacturing a hysteretic MEMS two-dimensional thermal device

INNOVATIVE MICRO TECH

Thermocompression bonding with raised feature

Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture

BEATON STEPHEN R

Eye drug delivery system

CARLSON GREGORY A

In-plane electromagnetic MEMS pump

FOSTER JOHN S

Dual substrate MEMS plate switch and method of manufacture