P

Inventor

LAI WEI-CHIH

TW32 patents
⚠️ This page may combine multiple inventors who share the name “LAI WEI-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

12 patents
US9823585B2Nov 21, 2017

EUV focus monitoring systems and methods

TAIWAN SEMICONDUCTOR MFG CO LTD28 citations94
US11515229B2Nov 29, 2022

Semiconductor package and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11013097B2May 18, 2021

Apparatus and method for generating extreme ultraviolet radiation

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US9368454B2Jun 14, 2016

Semiconductor device with shielding layer in post-passivation interconnect structure

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US12322726B2Jun 3, 2025

Method of forming an integrated circuit package having a padding layer on a carrier

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations64
US12302484B2May 13, 2025

Droplet generator and method of servicing extreme ultraviolet imaging tool

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12193136B2Jan 7, 2025

Apparatus and method for generating extreme ultraviolet radiation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12191224B2Jan 7, 2025

Semiconductor package and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11792909B2Oct 17, 2023

Apparatus and method for generating extreme ultraviolet radiation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11617255B2Mar 28, 2023

Droplet generator and method of servicing extreme ultraviolet imaging tool

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10361134B2Jul 23, 2019

Method for lithographic process and lithographic system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10342109B2Jul 2, 2019

Apparatus and method for generating extreme ultraviolet radiation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42

LAI WEI-CHIH

4 patents

ADVANCED EPITAXY TECHNOLOGY IN

3 patents

CHANG WEN-YUAN

2 patents

EPITECH TECHNOLOGY CORP

2 patents

LAM RES CORP

2 patents

LAI WEI CHIH

1 patent

AU OPTRONICS CORP

1 patent

UNITED MICROELECTRONICS CORP

1 patent

SHEU JINN KONG

1 patent

HUANG WEI-CHIAO

1 patent

UNIV NAT CHENG KUNG

1 patent

UNIV NAT CENTRAL

1 patent