P

Inventor

MAHARA KOJI

JP6 patents
⚠️ This page may combine multiple inventors who share the name “MAHARA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US6309116B1Oct 30, 2001

Substrate processing system

TOKYO ELECTRON LTD26 citations92
US7994793B2Aug 9, 2011

Jig for detecting position

TOKYO ELECTRON LTD18 citations83
US7884622B2Feb 8, 2011

Method of adjusting moving position of transfer arm and position detecting jig

TOKYO ELECTRON LTD11 citations81

MATSUMOTO TOSHIYUKI

2 patents
US8149005B2Apr 3, 2012

Jig for detecting position

MATSUMOTO TOSHIYUKI13 citations82
US8749257B2Jun 10, 2014

Position detecting method for performing position alignment of transfer point of transfer arm

MATSUMOTO TOSHIYUKI0 citations50

IKEDA HIDETOSHI

1 patent
US8890460B2Nov 18, 2014

Servo control device

IKEDA HIDETOSHI3 citations59