Inventor
YANG CHEOL-KYU
KR4 patents
⚠️ This page may combine multiple inventors who share the name “YANG CHEOL-KYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS9666459B2May 30, 2017
Apparatus for processing wafers
SAMSUNG ELECTRONICS CO LTD7 citations79
US7131456B2Nov 7, 2006
Mass flow controller
SAMSUNG ELECTRONICS CO LTD12 citations79
US7189661B2Mar 13, 2007
Method of forming silicon oxynitride layer in semiconductor device and apparatus of forming the same
SAMSUNG ELECTRONICS CO LTD2 citations61