Inventor
LEE SEOG-MIN
KR4 patents
⚠️ This page may combine multiple inventors who share the name “LEE SEOG-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS7140384B2Nov 28, 2006
Substrate processing equipment having mass flow controller
SAMSUNG ELECTRONICS CO LTD18 citations83
US9666459B2May 30, 2017
Apparatus for processing wafers
SAMSUNG ELECTRONICS CO LTD7 citations79
US7425761B2Sep 16, 2008
Method of manufacturing a dielectric film in a capacitor
SAMSUNG ELECTRONICS CO LTD6 citations61