Inventor
BURNHAM JAY S
US12 patents
⚠️ This page may combine multiple inventors who share the name “BURNHAM JAY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
9 patentsUS7138691B2Nov 21, 2006
Selective nitridation of gate oxides
IBM31 citations92
US6780720B2Aug 24, 2004
Method for fabricating a nitrided silicon-oxide gate dielectric
IBM37 citations92
US7291568B2Nov 6, 2007
Method for fabricating a nitrided silicon-oxide gate dielectric
IBM13 citations81
US7759260B2Jul 20, 2010
Selective nitridation of gate oxides
IBM5 citations73
US6706644B2Mar 16, 2004
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors
IBM7 citations72
US7342290B2Mar 11, 2008
Semiconductor metal contamination reduction for ultra-thin gate dielectrics
IBM6 citations70
US6838396B2Jan 4, 2005
Bilayer ultra-thin gate dielectric and process for semiconductor metal contamination reduction
IBM8 citations70
US8912091B2Dec 16, 2014
Backside metal ground plane with improved metal adhesion and design structures
IBM1 citations51
US6909157B2Jun 21, 2005
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors
IBM0 citations51
BURNHAM JAY S
3 patentsUS8758962B2Jun 24, 2014
Method and apparatus for sub-pellicle defect reduction on photomasks
BURNHAM JAY S0 citations48
US8173331B2May 8, 2012
Method and apparatus for sub-pellicle defect reduction on photomasks
BURNHAM JAY S0 citations48
US8709887B2Apr 29, 2014
Method for fabricating a nitrided silicon-oxide gate dielectric
BURNHAM JAY S0 citations45