Inventor
KINDT LOUIS M
US11 patents
⚠️ This page may combine multiple inventors who share the name “KINDT LOUIS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
9 patentsUS7198276B2Apr 3, 2007
Adaptive electrostatic pin chuck
IBM25 citations86
US7198872B2Apr 3, 2007
Light scattering EUVL mask
IBM11 citations79
US7049035B2May 23, 2006
Method for controlling linewidth in advanced lithography masks using electrochemistry
IBM11 citations79
US6777137B2Aug 17, 2004
EUVL mask structure and method of formation
IBM7 citations69
US11143953B2Oct 12, 2021
Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3
IBM0 citations61
US7132206B2Nov 7, 2006
Process and apparatus for minimizing thermal gradients across an advanced lithographic mask
IBM5 citations61
US7537114B2May 26, 2009
System and method for storing and transporting photomasks in fluid
IBM6 citations59
US7355680B2Apr 8, 2008
Method for adjusting lithographic mask flatness using thermally induced pellicle stress
IBM2 citations59
US7826038B2Nov 2, 2010
Method for adjusting lithographic mask flatness using thermally induced pellicle stress
IBM2 citations56