Inventor

OGATA TETSURO

JP2 patents

Patents

2 patents

US8778145B2Jul 15, 2014

Magnetic field control for uniform film thickness distribution in sputter apparatus

WATANABE EISAKU9 citations72

US8278212B2Oct 2, 2012

Method for manufacturing semiconductor memory element and sputtering apparatus

WATANABE EISAKU0 citations31