Inventor
LIN KUAN-CHUN
TW6 patents
Patents
6 patentsUS10217750B1Feb 26, 2019
Buried word line structure and method of making the same
UNITED MICROELECTRONICS CORP9 citations83
US10497704B2Dec 3, 2019
Buried word line structure and method of making the same
UNITED MICROELECTRONICS CORP3 citations72
US9853123B2Dec 26, 2017
Semiconductor structure and fabrication method thereof
UNITED MICROELECTRONICS CORP4 citations70
US11139384B2Oct 5, 2021
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP0 citations61
US10490643B2Nov 26, 2019
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP0 citations50
US9711326B1Jul 18, 2017
Test structure for electron beam inspection and method for defect determination using electron beam inspection
UNITED MICROELECTRONICS CORP0 citations49