Inventor
GOULD RICHARD H
US34 patents
⚠️ This page may combine multiple inventors who share the name “GOULD RICHARD H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS9881820B2Jan 30, 2018
Front opening ring pod
LAM RES CORP124 citations97
US10062590B2Aug 28, 2018
Front opening ring pod
LAM RES CORP23 citations93
US10062589B2Aug 28, 2018
Front opening ring pod
LAM RES CORP20 citations93
US10483142B1Nov 19, 2019
Vacuum robot positioning system with reduced sensitivity to chamber pressure
LAM RES CORP10 citations81
US9698036B2Jul 4, 2017
Stacked wafer cassette loading system
LAM RES CORP7 citations77
US11521869B2Dec 6, 2022
Reduced footprint platform architecture with linear vacuum transfer module
LAM RES CORP3 citations72
US11393705B2Jul 19, 2022
Wafer transport assembly with integrated buffers
LAM RES CORP2 citations71
US10790174B2Sep 29, 2020
Wafer transport assembly with integrated buffers
LAM RES CORP1 citations71
US11908714B2Feb 20, 2024
Transfer robot for reduced footprint platform architecture
LAM RES CORP0 citations62
US11764086B2Sep 19, 2023
Wafer transport assembly with integrated buffers
LAM RES CORP0 citations61
US10559483B2Feb 11, 2020
Platform architecture to improve system productivity
LAM RES CORP1 citations59
US12272583B2Apr 8, 2025
Reduced footprint wafer handling platform
LAM RES CORP0 citations47
US12575365B2Mar 10, 2026
Edge ring transfer with automated rotational pre-alignment
LAM RES CORP0 citations46
ASYST TECHNOLOGIES
11 patentsUS7293950B2Nov 13, 2007
Universal modular wafer transport system
ASYST TECHNOLOGIES72 citations98
US6308818B1Oct 30, 2001
Transport system with integrated transport carrier and directors
ASYST TECHNOLOGIES126 citations98
US6468021B1Oct 22, 2002
Integrated intra-bay transfer, storage, and delivery system
ASYST TECHNOLOGIES166 citations97
US6494308B2Dec 17, 2002
Integrated roller transport pod and asynchronous conveyor
ASYST TECHNOLOGIES46 citations96
US6435330B1Aug 20, 2002
In/out load port transfer mechanism
ASYST TECHNOLOGIES60 citations96
US6223886B1May 1, 2001
Integrated roller transport pod and asynchronous conveyor
ASYST TECHNOLOGIES50 citations96
US6533101B2Mar 18, 2003
Integrated transport carrier and conveyor system
ASYST TECHNOLOGIES44 citations93
US6481558B1Nov 19, 2002
Integrated load port-conveyor transfer system
ASYST TECHNOLOGIES47 citations93
US7066707B1Jun 27, 2006
Wafer engine
ASYST TECHNOLOGIES28 citations92
US7217076B2May 15, 2007
Semiconductor material handling system
ASYST TECHNOLOGIES18 citations84
US7100340B2Sep 5, 2006
Unified frame for semiconductor material handling system
ASYST TECHNOLOGIES16 citations84
BONORA ANTHONY C
3 patentsUS8851817B2Oct 7, 2014
Universal modular wafer transport system
BONORA ANTHONY C33 citations94
US8882433B2Nov 11, 2014
Integrated systems for interfacing with substrate container storage systems
BONORA ANTHONY C20 citations92
US8851820B2Oct 7, 2014
Substrate container storage system
BONORA ANTHONY C15 citations84