Inventor
YEN YU-TING
TW15 patents
⚠️ This page may combine multiple inventors who share the name “YEN YU-TING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS9281192B2Mar 8, 2016
CMP-friendly coatings for planar recessing or removing of variable-height layers
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US11069533B2Jul 20, 2021
CMP system and method of use
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10957609B2Mar 23, 2021
Detecting the cleanness of wafer after post-CMP cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12424449B2Sep 23, 2025
CMP system and method of use
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11984323B2May 14, 2024
CMP system and method of use
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10157801B2Dec 18, 2018
Detecting the cleanness of wafer after post-CMP cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9679782B1Jun 13, 2017
Planarization method, method for manufacturing semiconductor structure, and semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9337066B2May 10, 2016
Wafer cleaning module
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51