Inventor
MIYAHARA TAKAHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MIYAHARA TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS10312078B2Jun 4, 2019
Nitride film forming method and storage medium
TOKYO ELECTRON LTD6 citations72
US9293323B2Mar 22, 2016
Method of forming silicon film
TOKYO ELECTRON LTD3 citations71
US10304676B2May 28, 2019
Method and apparatus for forming nitride film
TOKYO ELECTRON LTD1 citations62
US9777366B2Oct 3, 2017
Thin film forming method
TOKYO ELECTRON LTD1 citations52
US9145604B2Sep 29, 2015
Thin film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations52
US10672617B2Jun 2, 2020
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations51
US10475665B2Nov 12, 2019
Heating method, film forming method, semiconductor device manufacturing method, and film forming apparatus
TOKYO ELECTRON LTD0 citations51
US9972486B2May 15, 2018
Nitride film forming method and storage medium
TOKYO ELECTRON LTD0 citations51
US12588435B2Mar 24, 2026
Selective inhibition for selective metal deposition
TOKYO ELECTRON LTD0 citations50
US7923357B2Apr 12, 2011
Method for forming poly-silicon film
TOKYO ELECTRON LTD0 citations41
US9263256B2Feb 16, 2016
Method of forming seed layer, method of forming silicon film, and film forming apparatus
TOKYO ELECTRON LTD0 citations40
US9390907B2Jul 12, 2016
Film forming method of SiCN film
TOKYO ELECTRON LTD0 citations36