Inventor

BLUMRICH JÖRG FREDERIK

DE2 patents

Patents

2 patents

US10108085B2Oct 23, 2018

Method for localizing defects on substrates

ZEISS CARL SMT GMBH13 citations79

US10386297B2Aug 20, 2019

Method and apparatus for examining an element of a photolithographic mask for the EUV range

ZEISS CARL SMT GMBH2 citations68