Inventor
DAI XINTUO
US21 patents
⚠️ This page may combine multiple inventors who share the name “DAI XINTUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
19 patentsUS9620380B1Apr 11, 2017
Methods for fabricating integrated circuits using self-aligned quadruple patterning
GLOBALFOUNDRIES INC31 citations93
US9991361B2Jun 5, 2018
Methods for performing a gate cut last scheme for FinFET semiconductor devices
GLOBALFOUNDRIES INC9 citations84
US10705435B2Jul 7, 2020
Self-referencing and self-calibrating interference pattern overlay measurement
GLOBALFOUNDRIES INC8 citations80
US10635007B1Apr 28, 2020
Apparatus and method for aligning integrated circuit layers using multiple grating materials
GLOBALFOUNDRIES INC11 citations79
US10062772B2Aug 28, 2018
Preventing bridge formation between replacement gate and source/drain region through STI structure
GLOBALFOUNDRIES INC5 citations73
US9812324B1Nov 7, 2017
Methods to control fin tip placement
GLOBALFOUNDRIES INC4 citations73
US9780002B1Oct 3, 2017
Threshold voltage and well implantation method for semiconductor devices
GLOBALFOUNDRIES INC2 citations72
US9329471B1May 3, 2016
Achieving a critical dimension target based on resist characteristics
GLOBALFOUNDRIES INC2 citations62
US9329495B2May 3, 2016
Overlay metrology system and method
GLOBALFOUNDRIES INC2 citations59
US9698018B1Jul 4, 2017
Introducing self-aligned dopants in semiconductor fins
GLOBALFOUNDRIES INC1 citations52
US9947545B2Apr 17, 2018
Methods for gate formation in circuit structures
GLOBALFOUNDRIES INC0 citations51
US9640402B1May 2, 2017
Methods for gate formation in circuit structures
GLOBALFOUNDRIES INC1 citations51
US9606432B2Mar 28, 2017
Alternating space decomposition in circuit structure fabrication
GLOBALFOUNDRIES INC1 citations51
US10483214B2Nov 19, 2019
Overlay structures
GLOBALFOUNDRIES INC0 citations48
US10833022B2Nov 10, 2020
Structure and method to improve overlay performance in semiconductor devices
GLOBALFOUNDRIES INC0 citations46
US10504851B2Dec 10, 2019
Structure and method to improve overlay performance in semiconductor devices
GLOBALFOUNDRIES INC0 citations46
US9627274B1Apr 18, 2017
Methods of forming self-aligned contacts on FinFET devices
GLOBALFOUNDRIES INC0 citations41
US10056458B2Aug 21, 2018
Siloxane and organic-based MOL contact patterning
GLOBALFOUNDRIES INC0 citations39
US10809633B1Oct 20, 2020
Overlay control with corrections for lens aberrations
GLOBALFOUNDRIES INC0 citations38