Inventor
XING TINGWEN
CN6 patents
⚠️ This page may combine multiple inventors who share the name “XING TINGWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INST OPTICS & ELECTRONICS CAS
3 patentsUS11365964B2Jun 21, 2022
Stitching-measurement device and stitching-measurement method
INST OPTICS & ELECTRONICS CAS0 citations43
US11268808B2Mar 8, 2022
Detection device for detecting lens surface in stitching interferometer
INST OPTICS & ELECTRONICS CAS0 citations43
US10976670B2Apr 13, 2021
Apparatus and method for detecting optimal focal plane of lithographic projection objective lens
INST OPTICS & ELECTRONICS CAS0 citations40