Inventor
KUAN WAN-CHUN
TW10 patents
Patents
10 patentsUS10679950B2Jun 9, 2020
Methods of forming recesses in substrates by etching dummy Fins
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10297555B2May 21, 2019
Integrated circuit structure having crown-shaped semiconductor strips and recesses in the substrate from etched dummy fins
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations83
US10734246B2Aug 4, 2020
Heat shield for chamber door and devices manufactured using same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12424568B2Sep 23, 2025
Method for forming recesses in a substrate by etching dummy fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11488912B2Nov 1, 2022
Method for forming recesses in a substrate by etching dummy fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12074032B2Aug 27, 2024
Heat shield for chamber door and devices manufactured using same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11031252B2Jun 8, 2021
Heat shield for chamber door and devices manufactured using same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10861800B2Dec 8, 2020
Integrated circuit structure having a crown-shaped semiconductor strip and an isolation region recessed in the substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10825739B2Nov 3, 2020
FinFET devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10510615B2Dec 17, 2019
FinFET devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50