Inventor
CHUANG MENG-JE
TW6 patents
Patents
6 patentsUS10734246B2Aug 4, 2020
Heat shield for chamber door and devices manufactured using same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12074032B2Aug 27, 2024
Heat shield for chamber door and devices manufactured using same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11031252B2Jun 8, 2021
Heat shield for chamber door and devices manufactured using same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10825739B2Nov 3, 2020
FinFET devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10510615B2Dec 17, 2019
FinFET devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10032661B2Jul 24, 2018
Semiconductor device, method, and tool of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45