Inventor

KATAYAMA TOMOHIDE

JP8 patents

⚠️ This page may combine multiple inventors who share the name “KATAYAMA TOMOHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AZ ELECTRONIC MAT LUXEMBOURG SARL

4 patents

US11079680B2Aug 3, 2021

High heat resistance resist composition and pattern forming method using the same

AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations47

US10106428B2Oct 23, 2018

Method for producing surface-modified silica nanoparticles, and surface-modified silica nanoparticles

AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations46

US10859916B2Dec 8, 2020

Composition for forming fine pattern and method for forming fine pattern using the same

AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations45

US11221558B2Jan 11, 2022

Bottom antireflective coating forming composition

AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations42

AZ ELECTRONIC MATERIALS USA

1 patent

US8039202B2Oct 18, 2011

Positive-working photoimageable bottom antireflective coating

AZ ELECTRONIC MATERIALS USA11 citations81

MERCK PATENT GMBH

1 patent

US12441822B2Oct 14, 2025

Polymer, semiconductor composition comprising polymer, and method for manufacturing film using semiconductor composition

MERCK PATENT GMBH0 citations45

RIDGEFIELD ACQUISITION

1 patent

US11029599B2Jun 8, 2021

Chemically amplified positive photoresist composition and pattern forming method using same

RIDGEFIELD ACQUISITION0 citations42

SAO Takayuki

1 patent

US8852855B2Oct 7, 2014

Upper surface antireflective film forming composition and pattern forming method using same

SAO Takayuki0 citations34