Inventor
MOHTASHAMI ABBAS
NL4 patents
Patents
4 patentsUS10976345B2Apr 13, 2021
Atomic force microscopy device, method and lithographic system
TNO0 citations48
US10942200B2Mar 9, 2021
Heterodyne atomic force microscopy device, method and lithographic system
TNO0 citations48
US11289367B2Mar 29, 2022
Method, atomic force microscopy system and computer program product
TNO0 citations46
US11927564B2Mar 12, 2024
Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same
TNO0 citations45