Inventor
ROSS MATTHEW
GB16 patents
⚠️ This page may combine multiple inventors who share the name “ROSS MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ELECTRON VISION CORP
5 patentsUS6548899B2Apr 15, 2003
Method of processing films prior to chemical vapor deposition using electron beam processing
ELECTRON VISION CORP132 citations98
US6358670B1Mar 19, 2002
Enhancement of photoresist plasma etch resistance via electron beam surface cure
ELECTRON VISION CORP105 citations96
US6204201B1Mar 20, 2001
Method of processing films prior to chemical vapor deposition using electron beam processing
ELECTRON VISION CORP75 citations95
US6319655B1Nov 20, 2001
Modification of 193 nm sensitive photoresist materials by electron beam exposure
ELECTRON VISION CORP67 citations94
US6426127B1Jul 30, 2002
Electron beam modification of perhydrosilazane spin-on glass
ELECTRON VISION CORP37 citations90