Inventor
POLO ALESSANDRO
BE17 patents
Patents
17 patentsUS10845304B2Nov 24, 2020
Scatterometer and method of scatterometry using acoustic radiation
ASML NETHERLANDS BV2 citations72
US10788766B2Sep 29, 2020
Metrology sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV4 citations72
US10678145B2Jun 9, 2020
Radiation receiving system
ASML NETHERLANDS BV2 citations72
US10317808B2Jun 11, 2019
Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method
ASML NETHERLANDS BV3 citations72
US10585363B2Mar 10, 2020
Alignment system
ASML NETHERLANDS BV4 citations70
US11086240B2Aug 10, 2021
Metrology sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV2 citations68
US10466601B2Nov 5, 2019
Alignment sensor for lithographic apparatus
ASML NETHERLANDS BV5 citations68
US11927891B2Mar 12, 2024
Apparatus and methods for determining the position of a target structure on a substrate
ASML NETHERLANDS BV0 citations62
US11536654B2Dec 27, 2022
Scatterometer and method of scatterometry using acoustic radiation
ASML NETHERLANDS BV0 citations62
US11333985B2May 17, 2022
Position sensor
ASML NETHERLANDS BV0 citations62
US10444638B2Oct 15, 2019
Method for parameter determination and apparatus thereof
ASML NETHERLANDS BV1 citations62
US11761929B2Sep 19, 2023
Sensor apparatus for lithographic measurements
ASML NETHERLANDS BV0 citations61
US11428925B2Aug 30, 2022
Position metrology apparatus and associated optical elements
ASML NETHERLANDS BV0 citations61
US11300892B2Apr 12, 2022
Sensor apparatus and method for lithographic measurements
ASML NETHERLANDS BV0 citations61
US11099489B2Aug 24, 2021
Method of measuring a parameter of a lithographic process, metrology apparatus
ASML NETHERLANDS BV0 citations61
US10101675B2Oct 16, 2018
Metrology apparatus, method of measuring a structure and lithographic apparatus
ASML NETHERLANDS BV1 citations51
US10527959B2Jan 7, 2020
Position sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV0 citations41