Inventor
OGATA TOMOHIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OGATA TOMOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUS11002687B2May 11, 2021
Defect inspection method and defect inspection device
HITACHI HIGH TECH CORP2 citations72
US11193895B2Dec 7, 2021
Semiconductor substrate for evaluation and method using same to evaluate defect detection sensitivity of inspection device
HITACHI HIGH TECH CORP2 citations69
US11515121B2Nov 29, 2022
Electron beam device
HITACHI HIGH TECH CORP0 citations62
US10923315B2Feb 16, 2021
Charged particle beam apparatus, and method of adjusting charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations62
US11342211B2May 24, 2022
Wafer inspection apparatus and wafer inspection method
HITACHI HIGH TECH CORP0 citations51
US11107655B2Aug 31, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10522320B2Dec 31, 2019
Charged particle beam device and method for adjusting charged particle beam device
HITACHI HIGH TECH CORP0 citations51
TORAY INDUSTRIES
3 patentsUS6159322ADec 12, 2000
Photosensitive ceramic green sheet, ceramic package, and process for producing the same
TORAY INDUSTRIES35 citations89
US5030597AJul 9, 1991
Process for producing ceramic composites
TORAY INDUSTRIES26 citations88
US5957398ASep 28, 1999
Composite ceramic materials as a pulverization medium and for working parts of a pulverizer
TORAY INDUSTRIES19 citations85