Inventor
MURAKOSHI HISAYA
JP34 patents
⚠️ This page may combine multiple inventors who share the name “MURAKOSHI HISAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
15 patentsUS7075076B2Jul 11, 2006
Inspection system, inspection method, and process management method
HITACHI HIGH TECH CORP20 citations93
US7022986B2Apr 4, 2006
Apparatus and method for wafer pattern inspection
HITACHI HIGH TECH CORP30 citations92
US7288948B2Oct 30, 2007
Patterned wafer inspection method and apparatus therefor
HITACHI HIGH TECH CORP15 citations84
US7982188B2Jul 19, 2011
Apparatus and method for wafer pattern inspection
HITACHI HIGH TECH CORP9 citations83
US7989768B2Aug 2, 2011
Scanning electron microscope
HITACHI HIGH TECH CORP6 citations74
US7394066B2Jul 1, 2008
Electron microscope and electron beam inspection system
HITACHI HIGH TECH CORP8 citations74
US11002687B2May 11, 2021
Defect inspection method and defect inspection device
HITACHI HIGH TECH CORP2 citations72
US7566871B2Jul 28, 2009
Method and apparatus for pattern inspection
HITACHI HIGH TECH CORP3 citations63
US11515121B2Nov 29, 2022
Electron beam device
HITACHI HIGH TECH CORP0 citations62
US10923315B2Feb 16, 2021
Charged particle beam apparatus, and method of adjusting charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations62
US10170273B2Jan 1, 2019
Charged particle beam device, and method of manufacturing component for charged particle beam device
HITACHI HIGH TECH CORP1 citations62
US7547884B2Jun 16, 2009
Pattern defect inspection method and apparatus thereof
HITACHI HIGH TECH CORP4 citations62
US7411190B2Aug 12, 2008
Inspection system, inspection method, and process management method
HITACHI HIGH TECH CORP0 citations52
US11107655B2Aug 31, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10522320B2Dec 31, 2019
Charged particle beam device and method for adjusting charged particle beam device
HITACHI HIGH TECH CORP0 citations51
HITACHI LTD
14 patentsUS6583413B1Jun 24, 2003
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD123 citations99
US6797954B2Sep 28, 2004
Patterned wafer inspection method and apparatus therefor
HITACHI LTD42 citations96
US6476390B1Nov 5, 2002
Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams
HITACHI LTD68 citations96
US7098455B2Aug 29, 2006
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD26 citations93
US6979823B2Dec 27, 2005
Patterned wafer inspection method and apparatus therefor
HITACHI LTD21 citations93
US5744800AApr 28, 1998
Defect observing electron microscope
HITACHI LTD27 citations92
US5373158ADec 13, 1994
Field-emission transmission electron microscope and operation method thereof
HITACHI LTD21 citations92
US4600839AJul 15, 1986
Small-dimension measurement system by scanning electron beam
HITACHI LTD35 citations92
US7397031B2Jul 8, 2008
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD10 citations84
US4767926AAug 30, 1988
Electron beam metrology system
HITACHI LTD23 citations82
US7242015B2Jul 10, 2007
Patterned wafer inspection method and apparatus therefor
HITACHI LTD6 citations74
US5134289AJul 28, 1992
Field emission electron device which produces a constant beam current
HITACHI LTD7 citations74
US4751384AJun 14, 1988
Electron beam metrology system
HITACHI LTD10 citations74
US4605860AAug 12, 1986
Apparatus for focusing a charged particle beam onto a specimen
HITACHI LTD9 citations73