Inventor

KANEOKA NORIYUKI

JP17 patents

⚠️ This page may combine multiple inventors who share the name “KANEOKA NORIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KANEOKA NORIYUKI

HITACHI HIGH TECH CORP

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

Ion beam processing apparatus

Charge particle beam system, sample processing method, and semiconductor inspection system

Manufacturing equipment using ION beam or electron beam

Defect inspection method and defect inspection device

Semiconductor substrate for evaluation and method using same to evaluate defect detection sensitivity of inspection device

Electron beam device

Charged particle beam apparatus, and method of adjusting charged particle beam apparatus

Apparatus for ion beam fabrication

Charged particle beam device

Charged particle beam device and method for adjusting charged particle beam device

HITACHI LTD

Presearch type document search method and apparatus

Hierarchical presearch type text search method and apparatus and magnetic disk unit used in the apparatus

Hierarchical presearch type text search method and apparatus and magnetic disk unit used in the apparatus

Scanning electron microscope

SHICHI HIROYASU

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

Dual beam apparatus with tilting sample stage