Inventor
ROY NILABH K
US16 patents
Patents
16 patentsUS11776840B2Oct 3, 2023
Superstrate chuck, method of use, and method of manufacturing an article
CANON KK2 citations71
US12366800B2Jul 22, 2025
Method for improving accuracy of imprint force application in imprint lithography
CANON KK1 citations63
US11994797B2May 28, 2024
System and method for shaping a film with a scaled calibration measurement parameter
CANON KK1 citations61
US11480871B2Oct 25, 2022
Apparatus and method for improving accuracy of imprint force application in imprint lithography
CANON KK0 citations61
US11199774B2Dec 14, 2021
Method and apparatus to improve frame cure imaging resolution for extrusion control
CANON KK0 citations61
US11776833B2Oct 3, 2023
Method for improving accuracy of imprint force application in imprint lithography
CANON KK1 citations60
US12498634B2Dec 16, 2025
System and method for generating control values for overlay control of an imprint tool
CANON KK0 citations51
US12463081B2Nov 4, 2025
Apparatus including a bonding head and a method of using the same
CANON KK0 citations51
US12124165B2Oct 22, 2024
Apparatus and method for optimizing actuator forces
CANON KK0 citations51
US11656546B2May 23, 2023
Exposure apparatus for uniform light intensity and methods of using the same
CANON KK0 citations51
US11443940B2Sep 13, 2022
Apparatus for uniform light intensity and methods of using the same
CANON KK0 citations51
US11366384B2Jun 21, 2022
Nanoimprint lithography system and method for adjusting a radiation pattern that compensates for slippage of a template
CANON KK0 citations51
US11327409B2May 10, 2022
Systems and methods for curing an imprinted field
CANON KK0 citations51
US12321103B2Jun 3, 2025
System and method of generating a set of illumination patterns for use in a photomechanical shaping system
CANON KK0 citations50
US11725272B2Aug 15, 2023
Method, system and apparatus for cooling a substrate
CANON KK0 citations50
US12505531B2Dec 23, 2025
System and method of generating a modulation map for a spatial light modulator to illuminate a template used in a photomechanical shaping system
CANON KK0 citations49