Inventor
MALIK SULTAN
US14 patents
⚠️ This page may combine multiple inventors who share the name “MALIK SULTAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS9728437B2Aug 8, 2017
High temperature chuck for plasma processing systems
APPLIED MATERIALS INC123 citations98
US10748783B2Aug 18, 2020
Gas delivery module
APPLIED MATERIALS INC17 citations93
US10675581B2Jun 9, 2020
Gas abatement apparatus
APPLIED MATERIALS INC19 citations91
US10704141B2Jul 7, 2020
In-situ CVD and ALD coating of chamber to control metal contamination
APPLIED MATERIALS INC7 citations83
US12198951B2Jan 14, 2025
High pressure wafer processing systems and related methods
APPLIED MATERIALS INC1 citations74
US11948828B2Apr 2, 2024
Pin-less substrate transfer apparatus and method for a processing chamber
APPLIED MATERIALS INC0 citations62
US11749555B2Sep 5, 2023
Semiconductor processing system
APPLIED MATERIALS INC1 citations62
US11361978B2Jun 14, 2022
Gas delivery module
APPLIED MATERIALS INC0 citations62
USD941787SJan 25, 2022
Substrate transfer blade
APPLIED MATERIALS INC1 citations62
US11110383B2Sep 7, 2021
Gas abatement apparatus
APPLIED MATERIALS INC0 citations59
US10468285B2Nov 5, 2019
High temperature chuck for plasma processing systems
APPLIED MATERIALS INC0 citations52
MICROMATERIALS LLC
3 patentsUS10529603B2Jan 7, 2020
High pressure wafer processing systems and related methods
MICROMATERIALS LLC20 citations93
US10224224B2Mar 5, 2019
High pressure wafer processing systems and related methods
MICROMATERIALS LLC19 citations93
US10179941B1Jan 15, 2019
Gas delivery system for high pressure processing chamber
MICROMATERIALS LLC29 citations93