Inventor
JDIRA LUCIAN C
NL10 patents
⚠️ This page may combine multiple inventors who share the name “JDIRA LUCIAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
8 patentsUS10900122B2Jan 26, 2021
Apparatus for semiconductor wafer processing
ASM IP HOLDING BV7 citations82
US10683571B2Jun 16, 2020
Gas supply manifold and method of supplying gases to chamber using same
ASM IP HOLDING BV8 citations81
US9153466B2Oct 6, 2015
Wafer boat
ASM IP HOLDING BV10 citations80
US10954597B2Mar 23, 2021
Atomic layer deposition apparatus
ASM IP HOLDING BV8 citations79
US10605530B2Mar 31, 2020
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
ASM IP HOLDING BV2 citations69
US12467141B2Nov 11, 2025
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus
ASM IP HOLDING BV0 citations61
US11891696B2Feb 6, 2024
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus
ASM IP HOLDING BV0 citations61
US12195852B2Jan 14, 2025
Substrate processing apparatus with an injector
ASM IP HOLDING BV0 citations50