Inventor

FEDER RALPH

3 patents

Patents

3 patents

US3984582AOct 5, 1976

Method for preparing positive resist image

IBM38 citations91

US4018938AApr 19, 1977

Fabrication of high aspect ratio masks

IBM46 citations89

US4293374AOct 6, 1981

High aspect ratio, high resolution mask fabrication

IBM9 citations68