Inventor
SPILLER EBERHARD A
9 patents
⚠️ This page may combine multiple inventors who share the name “SPILLER EBERHARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS3984582AOct 5, 1976
Method for preparing positive resist image
IBM38 citations91
US4018938AApr 19, 1977
Fabrication of high aspect ratio masks
IBM46 citations89
US4595261AJun 17, 1986
Phase retardation element and prism for use in an optical data storage system
IBM5 citations62
US4268952AMay 26, 1981
Method for fabricating self-aligned high resolution non planar devices employing low resolution registration
IBM3 citations59
UNIV CALIFORNIA
3 patentsUS6134049AOct 17, 2000
Method to adjust multilayer film stress induced deformation of optics
UNIV CALIFORNIA71 citations95
US6634760B2Oct 21, 2003
Low-cost method for producing extreme ultraviolet lithography optics
UNIV CALIFORNIA21 citations92
US5958143ASep 28, 1999
Cleaning process for EUV optical substrates
UNIV CALIFORNIA21 citations91