Inventor

PETRY KLAUS

US17 patents

⚠️ This page may combine multiple inventors who share the name “PETRY KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PETRY KLAUS

AXCELIS TECH INC

Ion beam measurement systems and methods for ion implant dose and uniformity control

Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp

Combination load lock for handling workpieces

Load lock control

Ion source for use in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Semiconductor workpiece temperature measurement system

Semiconductor workpiece temperature measurement system

System and method to monitor glitch energy

AHLGREN RALPH B

Solar energy converter and method for converting solar energy

Self-contained, multi-fluid energy conversion and management system for converting solar energy to electric and thermal energy

DAIMLER BENZ AEROSPACE AIRBUS

Ventilating system for reducing contaminations in the air of an aircraft

DAIMIER BENZ AEROSPACE AIRBUS

Method and apparatus for air conditioning two passenger decks of an aircraft

PRADHAN NILAY ANIL

FinFET device fabrication using thermal implantation

VARIAN SEMICONDUCTOR EQUIPMENT

Platen clamping surface monitoring

STONE DALE K

Removal of charge between a substrate and an electrostatic clamp

PETRY KLAUS

Electrostatic chuck with radiative heating

BECKER KLAUS

Current limiter for high voltage power supply used with ion implantation system