Inventor

KAIM ROBERT E

US4 patents

⚠️ This page may combine multiple inventors who share the name “KAIM ROBERT E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN ASSOCIATES

2 patents

US4922106AMay 1, 1990

Ion beam scanning method and apparatus

VARIAN ASSOCIATES162 citations97

US4980562ADec 25, 1990

Method and apparatus for high efficiency scanning in an ion implanter

VARIAN ASSOCIATES123 citations95

KAIM ROBERT E

1 patent

US7057192B2Jun 6, 2006

Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams

KAIM ROBERT E26 citations87

ADVANCED ION BEAM TECH INC

1 patent

US9748072B2Aug 29, 2017

Lower dose rate ion implantation using a wider ion beam

ADVANCED ION BEAM TECH INC0 citations37