Inventor

NAKATA TOSHIHIKO

JP106 patents

⚠️ This page may combine multiple inventors who share the name “NAKATA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKATA TOSHIHIKO

HITACHI LTD

Method and apparatus for inspecting defects in a patterned specimen

Method of inspecting a DNA chip

Laser annealing apparatus, TFT device and annealing method of the same

Defect inspection method and apparatus therefor

Method for making specimen and apparatus thereof

Method and equipment for detecting pattern defect

Method and apparatus for detecting photoacoustic signal

Method and apparatus for processing a minute portion of a specimen

Method and apparatus for processing a minute portion of a specimen

Exposure apparatus and method of aligning exposure mask with workpiece

Method and apparatus for detecting photoacoustic signal

Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen

Method for detecting foreign matter and device for realizing same

Defect detector and defect detecting method

Method and apparatus for inspecting pattern defects

Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope

Apparatus enabling particle detection utilizing wide view lens

Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses

Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses

Method and device for detecting end point of plasma treatment, method and device for manufacturing semiconductor device, and semiconductor device

Method and apparatus for detecting photoacoustic signal

Photocoustic signal detecting device

Method and apparatus for detecting photoacoustic signal and method for detecting internal defect of semiconductor device

Projection alignment method and apparatus

Apparatus and method for inspecting pattern

Apparatus and method for inspecting pattern

Temperature measuring method using thermal expansion and an apparatus for carrying out the same

Method of inspecting a DNA chip and apparatus thereof

Scanning probe microscope and a measuring method using the same

Scanning probe microscope

Scanning probe microscope

Scanning probe microscope

Scanning probe microscope and sample observing method using this and semiconductor device production method

Method of manufacturing display device

Defect inspection method and apparatus therefor

Method and apparatus for detecting pattern defects

Method and apparatus for inspecting defects of a specimen

Floating particle inspection method and its apparatus and a semiconductor device processing apparatus

Substrate surface deflecting device

Method and equipment for detecting pattern defect

Method and apparatus for measuring displacement of a sample

Method and equipment for detecting pattern defect

HITACHI HIGH TECH CORP

Method and apparatus for detecting defects

Defects inspecting apparatus and defects inspecting method

HITACHI DISPLAYS LTD

Display device, process of fabricating same, and apparatus for fabricating same

Method of manufacturing display device

HITACHI HIGH TECH ELECT ENG CO

Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device

NAKANO HIROYUKI

Defect inspection device and defect inspection method

NAKATA TOSHIHIKO

Scanning probe microscope and method of observing sample using the same

RENESAS TECH CORP

Method of processing a semiconductor device