Inventor
KATSUYAMA AKIKO
JP21 patents
⚠️ This page may combine multiple inventors who share the name “KATSUYAMA AKIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
15 patentsUS5518579AMay 21, 1996
Method for forming a fine pattern
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD20 citations92
US6258972B1Jul 10, 2001
Pattern formation method and surface treating agent
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD18 citations82
US6528240B1Mar 4, 2003
Pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations74
US6521393B1Feb 18, 2003
Pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations74
US5866302AFeb 2, 1999
Pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations74
US5846692ADec 8, 1998
Pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations74
US6054255AApr 25, 2000
Pattern formation method and surface treating agent
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations71
US6673523B2Jan 6, 2004
Pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations63
US6475706B1Nov 5, 2002
Pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations63
US6444395B1Sep 3, 2002
Pattern formation material and method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations63
US5756262AMay 26, 1998
Method for forming pattern
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations63
US6168909B1Jan 2, 2001
Material and method for forming pattern
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations62
US6531259B1Mar 11, 2003
Pattern formation method and pattern formation material
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations52
US5856069AJan 5, 1999
Method for forming pattern
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations52
US6537736B1Mar 25, 2003
Patten formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations42
WAKO PURE CHEM IND LTD
6 patentsUS5558976ASep 24, 1996
Pattern formation method
WAKO PURE CHEM IND LTD67 citations95
US5558971ASep 24, 1996
Resist material
WAKO PURE CHEM IND LTD79 citations94
US6335143B1Jan 1, 2002
Resist composition containing specific cross-linking agent
WAKO PURE CHEM IND LTD24 citations92
US6143472ANov 7, 2000
Resist composition and a method for formation of a pattern using the composition
WAKO PURE CHEM IND LTD24 citations92
US5780206AJul 14, 1998
Fine pattern forming process using a resist composition sensitive to deep ultraviolet light
WAKO PURE CHEM IND LTD38 citations92
US5695910ADec 9, 1997
Resist composition for deep ultraviolet light
WAKO PURE CHEM IND LTD44 citations92