Inventor
AKAIKE SHINJI
JP6 patents
Patents
6 patentsUS5777485AJul 7, 1998
Probe method and apparatus with improved probe contact
TOKYO ELECTRON LTD141 citations95
US5640101AJun 17, 1997
Probe system and probe method
TOKYO ELECTRON LTD90 citations94
US5585738ADec 17, 1996
Probe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustment
TOKYO ELECTRON LTD30 citations90
US10074192B2Sep 11, 2018
Substrate inspection apparatus and control method thereof
TOKYO ELECTRON LTD0 citations35
US10006941B2Jun 26, 2018
Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unit
TOKYO ELECTRON LTD0 citations34
US10310010B2Jun 4, 2019
Probe apparatus and probe method
TOKYO ELECTRON LTD0 citations32