Inventor
OH SANG-JEONG
KR3 patents
Patents
3 patentsUS6008135ADec 28, 1999
Method for etching metal layer of a semiconductor device using hard mask
SAMSUNG ELECTRONICS CO LTD21 citations89
US6828616B2Dec 7, 2004
Integrated circuit devices that utilize doped Poly-Si1−xGex conductive plugs as interconnects
SAMSUNG ELECTRONICS CO LTD5 citations72
US7316954B2Jan 8, 2008
Methods of fabricating integrated circuit devices that utilize doped poly-Si1−xGex conductive plugs as interconnects
SAMSUNG ELECTRONICS CO LTD0 citations51