Inventor
GONZALEZ-MARTIN JOSE R
US9 patents
Patents
9 patentsUS6520839B1Feb 18, 2003
Load and unload station for semiconductor wafers
SPEEDFAM IPEC CORP51 citations95
US6227946B1May 8, 2001
Robot assisted method of polishing, cleaning and drying workpieces
SPEEDFAM IPEC CORP42 citations95
US5974681ANov 2, 1999
Apparatus for spin drying a workpiece
SPEEDFAM IPEC CORP50 citations95
US6213853B1Apr 10, 2001
Integral machine for polishing, cleaning, rinsing and drying workpieces
SPEEDFAM IPEC CORP58 citations94
US6852007B1Feb 8, 2005
Robotic method of transferring workpieces to and from workstations
SPEEDFAM IPEC CORP20 citations92
US6029369AFeb 29, 2000
Methods for spin drying a workpiece
SPEEDFAM IPEC CORP25 citations92
US6350177B1Feb 26, 2002
Combined CMP and wafer cleaning apparatus and associated methods
SPEEDFAM IPEC CORP17 citations91
US6364745B1Apr 2, 2002
Mapping system for semiconductor wafer cassettes
SPEEDFAM IPEC CORP10 citations80
US6390897B1May 21, 2002
Cleaning station integral with polishing machine for semiconductor wafers
SPEEDFAM IPEC CORP6 citations73