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Inventor
TAKAMATSU TOSHIYUKI
JP
8 patents
⚠️ This page may combine multiple inventors who share the name “TAKAMATSU TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANNEAL CORP
1 patent
US6579465B1
Jun 17, 2003
Plasma surface treatment method and resulting device
ANNEAL CORP
28 citations
90
MITZEL JAMES W
1 patent
US6149829A
Nov 21, 2000
Plasma surface treatment method and resulting device
MITZEL JAMES W
30 citations
89
MATRIX INC
1 patent
US5259407A
Nov 9, 1993
Surface treatment method and apparatus for a semiconductor wafer
MATRIX INC
77 citations
89
JIM MITZEL
1 patent
US7014788B1
Mar 21, 2006
Surface treatment method and equipment
JIM MITZEL
20 citations
88
MITZEL JIM
1 patent
US6255197B1
Jul 3, 2001
Hydrogen annealing method and apparatus
MITZEL JIM
22 citations
88
(unassigned)
1 patent
US6562079B1
May 13, 2003
Microwave discharge apparatus
11 citations
71
OTSUKA CHEMICAL CO LTD
1 patent
US6419772B1
Jul 16, 2002
Method for attaching radio wave absorber and structure for attaching the same
OTSUKA CHEMICAL CO LTD
9 citations
69
YAMANASHI PREFECTURAL FEDERATI
1 patent
US6472299B2
Oct 29, 2002
Method and apparatus for treating a substrate with hydrogen radicals at a temperature of less than 40 K
YAMANASHI PREFECTURAL FEDERATI
12 citations
64