Inventor
HSU YU-WEN
TW38 patents
⚠️ This page may combine multiple inventors who share the name “HSU YU-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
19 patentsUS10914368B2Feb 9, 2021
Ball screw with force sensor in radial direction
IND TECH RES INST8 citations84
US9249008B2Feb 2, 2016
MEMS device with multiple electrodes and fabricating method thereof
IND TECH RES INST12 citations82
US10703625B1Jul 7, 2020
Microelectromechanical system (MEMS) apparatus with adjustable spring
IND TECH RES INST3 citations73
US10436654B2Oct 8, 2019
Interaction force detection apparatus
IND TECH RES INST3 citations73
US10011476B1Jul 3, 2018
MEMS apparatus having impact absorber
IND TECH RES INST2 citations72
US10631368B2Apr 21, 2020
Micro-electromechanical temperature control system with thermal reservoir
IND TECH RES INST1 citations62
US10203252B2Feb 12, 2019
Microelectromechanical apparatus having a measuring range selector
IND TECH RES INST1 citations62
US10622996B1Apr 14, 2020
Adjustable sensing capacitance microelectromechanical system (MEMS) apparatus
IND TECH RES INST1 citations60
US11630020B2Apr 18, 2023
Pressure sensor with calibration device and calibration method thereof
IND TECH RES INST1 citations59
US10962992B2Mar 30, 2021
Apparatus with two anchors
IND TECH RES INST0 citations52
US9382112B2Jul 5, 2016
Manufacturing methods for micro-electromechanical system device having electrical insulating structure
IND TECH RES INST0 citations52
US11820650B2Nov 21, 2023
Microelectromechanical apparatus having hermitic chamber
IND TECH RES INST0 citations51
US11391641B1Jul 19, 2022
Calibration system for pressure sensor
IND TECH RES INST0 citations49
US11193819B2Dec 7, 2021
Vibration sensor with monitoring function and vibration signal monitoring method thereof
IND TECH RES INST0 citations46
US12264972B2Apr 1, 2025
Vertically integrated micro-bolometer and manufacturing method thereof
IND TECH RES INST0 citations43
US9529012B2Dec 27, 2016
Micro-electro mechanical apparatus with interdigitated spring
IND TECH RES INST0 citations41
US9238576B2Jan 19, 2016
Composite micro-electro-mechanical-system apparatus and manufacturing method thereof
IND TECH RES INST0 citations40
US10730744B2Aug 4, 2020
MEMS device with movable stage
IND TECH RES INST0 citations39
US10393718B2Aug 27, 2019
Micro-electromechanical apparatus for thermal energy control
IND TECH RES INST0 citations37
HSU YU-WEN
7 patentsUS8205498B2Jun 26, 2012
Multi-axis capacitive accelerometer
HSU YU-WEN46 citations92
US8421543B2Apr 16, 2013
Crystal oscillator and method for manufacturing the same
HSU YU-WEN7 citations82
US8242788B2Aug 14, 2012
Calibration apparatus and method for capacitive sensing devices
HSU YU-WEN8 citations81
US9733269B2Aug 15, 2017
Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame
HSU YU-WEN2 citations72
US8459114B2Jun 11, 2013
Multi-axis capacitive accelerometer
HSU YU-WEN5 citations71
US8857259B2Oct 14, 2014
Reading circuit of gyroscope
HSU YU-WEN6 citations70
US9563102B2Feb 7, 2017
Signal processing method of multiple mirco-electro-mechanical system (MEMS) devices and combo MEMS device applying the method
HSU YU-WEN0 citations50
CHEN LUNG-TAI
3 patentsUS8643125B2Feb 4, 2014
Structure and process for microelectromechanical system-based sensor
CHEN LUNG-TAI4 citations72
US8763457B2Jul 1, 2014
Sensing device and manufacturing method thereof
CHEN LUNG-TAI2 citations60
US9133018B2Sep 15, 2015
Structure and fabrication method of a sensing device
CHEN LUNG-TAI0 citations50
KAISER ALUMINIUM CHEM CORP
2 patentsHSU YU WEN
2 patentsHUANG CHAO TA
2 patentsUS9227841B2Jan 5, 2016
Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same
HUANG CHAO TA5 citations72
US8809972B2Aug 19, 2014
Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same
HUANG CHAO TA5 citations72