Inventor
WESTERMAN RUSSELL
US48 patents
⚠️ This page may combine multiple inventors who share the name “WESTERMAN RUSSELL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PLASMA THERM LLC
27 patentsUS8785332B2Jul 22, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC15 citations92
US8691702B2Apr 8, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC13 citations83
US9070760B2Jun 30, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations74
US10818552B2Oct 27, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations69
US10269641B2Apr 23, 2019
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations69
US9911654B2Mar 6, 2018
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US9105705B2Aug 11, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US8980764B2Mar 17, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US8796154B2Aug 5, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC2 citations63
US12489018B2Dec 2, 2025
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations62
US11908741B1Feb 20, 2024
Protective coating for plasma dicing
PLASMA THERM LLC0 citations62
US11747494B2Sep 5, 2023
Ion filter using aperture plate with plurality of zones
PLASMA THERM LLC1 citations62
US11587834B1Feb 21, 2023
Protective coating for plasma dicing
PLASMA THERM LLC1 citations62
US11488865B2Nov 1, 2022
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations62
US9343365B2May 17, 2016
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC2 citations61
US11651999B2May 16, 2023
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations58
US9082839B2Jul 14, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations58
US10573557B2Feb 25, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US10297427B2May 21, 2019
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US9202720B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US10707060B2Jul 7, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US9202721B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US8946058B2Feb 3, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US10497621B2Dec 3, 2019
Method for dicing a substrate with back metal
PLASMA THERM LLC0 citations48
US9368404B2Jun 14, 2016
Method for dicing a substrate with back metal
PLASMA THERM LLC0 citations48
US9202737B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations48
US10943825B2Mar 9, 2021
Method for dicing die attach film
PLASMA THERM LLC0 citations45
UNAXIS USA INC
9 patentsUS7101805B2Sep 5, 2006
Envelope follower end point detection in time division multiplexed processes
UNAXIS USA INC26 citations92
US6924235B2Aug 2, 2005
Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method
UNAXIS USA INC33 citations92
US6982175B2Jan 3, 2006
End point detection in time division multiplexed etch processes
UNAXIS USA INC18 citations84
US6544696B2Apr 8, 2003
Embedded attenuated phase shift mask and method of making embedded attenuated phase shift mask
UNAXIS USA INC15 citations82
US6905626B2Jun 14, 2005
Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma
UNAXIS USA INC11 citations73
US6846747B2Jan 25, 2005
Method for etching vias
UNAXIS USA INC4 citations63
US7115520B2Oct 3, 2006
Method and apparatus for process control in time division multiplexed (TDM) etch process
UNAXIS USA INC5 citations62
US7008877B2Mar 7, 2006
Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias
UNAXIS USA INC2 citations60
US7381650B2Jun 3, 2008
Method and apparatus for process control in time division multiplexed (TDM) etch processes
UNAXIS USA INC5 citations58
PLASMA-THERM LLC
5 patentsUS9711406B2Jul 18, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC6 citations84
US9564366B2Feb 7, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC1 citations63
US10741447B2Aug 11, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations52
US9496177B2Nov 15, 2016
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations52
USRE46339EMar 14, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations51