Inventor
OWEN CASSANDRA MAY
US8 patents
⚠️ This page may combine multiple inventors who share the name “OWEN CASSANDRA MAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7145641B2Dec 5, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV45 citations95
US7248332B2Jul 24, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations82
US7781149B2Aug 24, 2010
Reduced pitch multiple exposure process
ASML NETHERLANDS BV16 citations79
US7230674B2Jun 12, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7142287B2Nov 28, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV2 citations62
US7906270B2Mar 15, 2011
Reduced pitch multiple exposure process
ASML NETHERLANDS BV6 citations59
US7981595B2Jul 19, 2011
Reduced pitch multiple exposure process
ASML NETHERLANDS BV0 citations38