Inventor
MASONOBU IGETA
US2 patents
Patents
2 patentsUS7300891B2Nov 27, 2007
Method and system for increasing tensile stress in a thin film using multi-frequency electromagnetic radiation
TOKYO ELECTRON LTD7 citations70
US7265066B2Sep 4, 2007
Method and system for increasing tensile stress in a thin film using collimated electromagnetic radiation
TOKYO ELECTRON LTD3 citations53