Inventor
LEUSINK GERT
US14 patents
⚠️ This page may combine multiple inventors who share the name “LEUSINK GERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS5926737AJul 20, 1999
Use of TiCl4 etchback process during integrated CVD-Ti/TiN wafer processing
TOKYO ELECTRON LTD213 citations98
US6635569B1Oct 21, 2003
Method of passivating and stabilizing a Ti-PECVD process chamber and combined Ti-PECVD/TiN-CVD processing method and apparatus
TOKYO ELECTRON LTD24 citations92
US6992011B2Jan 31, 2006
Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma
TOKYO ELECTRON LTD25 citations89
US6853953B2Feb 8, 2005
Method for characterizing the performance of an electrostatic chuck
TOKYO ELECTRON LTD37 citations89
US7674710B2Mar 9, 2010
Method of integrating metal-containing films into semiconductor devices
TOKYO ELECTRON LTD10 citations83
US7393761B2Jul 1, 2008
Method for fabricating a semiconductor device
TOKYO ELECTRON LTD7 citations73
US7300891B2Nov 27, 2007
Method and system for increasing tensile stress in a thin film using multi-frequency electromagnetic radiation
TOKYO ELECTRON LTD7 citations70
US7479454B2Jan 20, 2009
Method and processing system for monitoring status of system components
TOKYO ELECTRON LTD3 citations57
US7265066B2Sep 4, 2007
Method and system for increasing tensile stress in a thin film using collimated electromagnetic radiation
TOKYO ELECTRON LTD3 citations53
US7419702B2Sep 2, 2008
Method for processing a substrate
TOKYO ELECTRON LTD1 citations49