Inventor
TIAN CAIZ HONG
JP3 patents
Patents
3 patentsUS7138767B2Nov 21, 2006
Surface wave plasma processing system and method of using
TOKYO ELECTRON LTD342 citations97
US7584714B2Sep 8, 2009
Method and system for improving coupling between a surface wave plasma source and a plasma space
TOKYO ELECTRON LTD7 citations72
US7268084B2Sep 11, 2007
Method for treating a substrate
TOKYO ELECTRON LTD8 citations69