Inventor
CHEUNG NATHAN
US18 patents
Patents
18 patentsUS6528391B1Mar 4, 2003
Controlled cleavage process and device for patterned films
SILICON GENESIS CORP422 citations99
US6511899B1Jan 28, 2003
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP133 citations99
US6321134B1Nov 20, 2001
Clustertool system software using plasma immersion ion implantation
SILICON GENESIS CORP357 citations99
US6207005B1Mar 27, 2001
Cluster tool apparatus using plasma immersion ion implantation
SILICON GENESIS CORP209 citations99
US6187110B1Feb 13, 2001
Device for patterned films
SILICON GENESIS CORP123 citations99
US6153524ANov 28, 2000
Cluster tool method using plasma immersion ion implantation
SILICON GENESIS CORP150 citations99
US6103599AAug 15, 2000
Planarizing technique for multilayered substrates
SILICON GENESIS CORP206 citations99
US6013567AJan 11, 2000
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP154 citations99
US5994207ANov 30, 1999
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP244 citations99
US5985742ANov 16, 1999
Controlled cleavage process and device for patterned films
SILICON GENESIS CORP493 citations99
US7348258B2Mar 25, 2008
Method and device for controlled cleaving process
SILICON GENESIS CORP55 citations98
US6582999B2Jun 24, 2003
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP109 citations98
US6291313B1Sep 18, 2001
Method and device for controlled cleaving process
SILICON GENESIS CORP137 citations98
US6155909ADec 5, 2000
Controlled cleavage system using pressurized fluid
SILICON GENESIS CORP80 citations97
US6265328B1Jul 24, 2001
Wafer edge engineering method and device
SILICON GENESIS CORP124 citations95
US7470600B2Dec 30, 2008
Method and device for controlled cleaving process
SILICON GENESIS CORP14 citations84
US8835282B2Sep 16, 2014
Controlled process and resulting device
SILICON GENESIS CORP2 citations63
US9159605B2Oct 13, 2015
Controlled process and resulting device
SILICON GENESIS CORP0 citations52