Inventor
OOWADA TAKUO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OOWADA TAKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KANTO KAGAKU
5 patentsUS6864044B2Mar 8, 2005
Photoresist residue removing liquid composition
KANTO KAGAKU87 citations96
US6787293B2Sep 7, 2004
Photoresist residue remover composition
KANTO KAGAKU15 citations82
US7563754B2Jul 21, 2009
Composition for removing photoresist residue and polymer residue
KANTO KAGAKU11 citations81
US7816312B2Oct 19, 2010
Composition for photoresist stripping solution and process of photoresist stripping
KANTO KAGAKU5 citations58
US7816313B2Oct 19, 2010
Photoresist residue remover composition and semiconductor circuit element production process employing the same
KANTO KAGAKU1 citations50